Transcribed

Materials Innovations Enabling Moore's Law

MATERIALS INNOVATIONS MOVE MOORE AND MORE CHIPS In the 1980s. the typical semiconductor used only a fraction of the primary elements. Today, six times as many elements are used - more than half of the periodic table. Hydrogen Helium *** *** H Не 1.008 1 4.003 2 1985 Lithium Beryllium Boron Carbon Nitrogen Oxygen Fluorine Neon *** *** *** *** Li Be C F Ne 6.941 9.012 4 10.81 5 12.01 6 14.01 7 16.00 8 19.00 9 20.18 10 Sodium Magnesium Aluminium Silicon Phosphorus Sulfur Chlorine Argon 1000nm feature size *** *** Na Mg Al Si S CI Ar 22.99 11 24.31 12 26.98 13 28.09 14 30.97 15 32.07 16 35.45 17 39.95 18 Potassium Calcium Scandium Titanium Vanadium Chromium Manganese Iron Cobalt Nickel Copper Zinc Gallium Germanium Arsenic Selenium Bromine Krypton * * * * * * * ** *** K Са Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr 39.10 19 40.08 20 44.96 21 47.87 22 50.94 23 52.00 54.94 25 55.84 26 58.93 27 58.69 28 63.55 29 65.39 30 69.72 31 72.63 32 74.92 33 78.96 34 79.90 35 83.80 36 Rubidium Strontium Yttrium Zirconium Niobium Molybdenum Technetium Ruthenium Rhodium Palladium Silver Cadmium Indium Tin Antimony Telurium lodine Xenon *** Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd Sn Sb Te Xe 85.47 37 87.62 38 88.91 39 91.22 40 92.91 41 95.94 42 [98] 43 101.07 44 102.91 45 106.42 46 107.87 47 112.41 48 114.82 49 118.71 50 121.76 51 127.60 52 126.90 53 131.29 54 Caesium Barium LANTHANIDES Hafnium Tantalum Tungsten Rhenium Osmium Iridium Platinum Gold Mercury Thallium Lead Bismuth Polonium Astatine Radon * * * ** * * *** Cs Ва Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Po At Rn 132.91 55 137.33 56 178.49 72 180.95 73 183.84 74 186.21 190.23 76 192.22 77 195.08 78 196.97 79 200.59 80 204.38 81 207.2 82 208.98 83 [209] 84 [210] 85 [222] 86 Francium Radium ACTINIDES Rutherfordium Dubnium Seaborgium Bohrium Hassium Meitnerium Darmstadtium Roentgenium Copernicium Ununtrium Flerovium Ununpentium Livermorium Ununseptium Ununoctium * * **** **** **** **** **** **** **** **** **** **** **** **** **** **** **** Fr Ra Rf Db Sg Bh Hs Mt Ds Rg Cn Uut FI Uup Lv Uus, Uuo [223] 87 [226] 88 [267] 104 [268] 105 [269] 106 [270] 107 [269] 108 [278] 109 [281] 110 [281] 111 [285] 112 [286] 113 [289] 114 [289] 115 [293] 116 [294] 117 [294] 118 Hydrogen Helium *** *** H Не 1.008 1 4.003 Lithium Beryllium Boron Carbon Nitrogen Oxygen Fluorine Neon *** *** *** *** Li Be B C F Ne 6.941 3 9.012 4 10.81 5 12.01 6 14.01 7 16.00 8 19.00 9 20.18 10 15nm feature size Sodium Magnesium Aluminium Silicon Phosphorus Sulfur Chlorine Argon * * * * *** *** Na Mg AI Si S CI Ar 22.99 11 24.31 12 26.98 13 28.09 14 30.97 15 32.07 16 35.45 17 39.95 18 Potassium Calcium candium Titanium Vanadium Chromium Manganese Iron Cobalt Nickel Copper Zinc Gallium Germanium Arsenic Selenium Bromine Krypton * * * * * * ** *** K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr 39.10 19 40.08 20 44.96 21 47.87 22 50.94 23 52.00 24 54.94 25 55.84 26 58.93 27 58.69 28 63.55 29 65.39 30 69.72 31 72.63 32 74.92 33 78.96 34 79.90 35 83.80 36 Rubidium Strontium Yttrium Zirconium Niobium Molybdenum Technetium Ruthenium Rhodium Palladium Silver Cadmium Indium Tin Antimony Tellurium lodine Xenon * * * * * * *** Rb Sr Y Zr Nb Мо Tc Ru Rh Pd Ag Cd In Sn Sb Te Xe 85.47 37 87.62 38 88.91 39 91.22 40 92.91 41 95.94 42 [98] 43 101.07 44 102.91 45 106.42 46 107.87 47 112.41 48 114.82 49 118.71 50 121.76 51 127.60 52 126.90 53 131.29 54 Caesium Barium LANTHANIDES Hafnium Tantalum Tungsten Rhenium Osmium Iridium Platinum Gold Mercury Thallium Lead Bismuth Polonium Astatine Radon * ** *** Cs Ва Hf Ta W Re Os Ir Pt Au Hg TI Pb Bi Ро At Rn 132.91 55 137.33 56 178.49 72 180.95 73 183.84 74 186.21 75 190.23 76 192.22 77 195.08 78 196.97 79 200.59 80 204.38 81 207.2 82 208.98 83 [209] 84 [210] 85 [222] 86 Ununseptium **** Francium Radium ACTINIDES Rutherfordium Dubnium Seaborgium Bohrium Hassium Meitnerium Darmstadtium Roentgenium **** Copernicium Flerovium Ununpentium Livermorium Ununtrium Ununoctium **** **** **** **** **** **** **** **** **** **** **** **** **** Fr Ra Rf Db Sg Bh Hs Mt Ds Cn Uut FI Uup Lv Uus, Uuo, [223] 87 [226] 88 [267] 104 [268] 105 [269] 106 [270] 107 [269] 108 [278] 109 [281] 110 [281] 111 [285] 112 [286] 113 [289] 114 [289] 115 [293] 116 [294] 117 [294] 118 Source: Intel, SanDisk, Intermolecular MAKING SMALLTHINGS MAKES BIG THINGS POSSIBLE semi TM Materials innovations by SEMI members enable advances in micro- electronics that keep Moore's Law moving and promise more to come. www.semi.org In 24

Materials Innovations Enabling Moore's Law

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2015 marks the 50th anniversary of Moore's Law, an "observation" that has ruled the development of semiconductor manufacturing since Intel co-founder Gordon Moore first published his ideas about the e... xponential advance of integrated circuits. The mantra of "smaller, faster, cheaper, and more powerful" has guided the industry for the past five decades, and despite nearing the physical limits of silicon-based technologies, we continue to push ahead with new innovations that keep Moore's Law moving. Materials innovations have played a vitally important role in advancing Moore's Law, with the chemistry of creating microelectronics growing increasingly complex. Whereas 30 years ago, only a handful of elements were needed to make a microchip, today more than half of all elements on the periodic table are used in some way in the manufacturing process.